Gas diffusion plate for a plasma processing apparatus



FIG. 1 is a front, bottom and right side perspective view of a gasdiffusion plate for a plasma processing apparatus according to thedesign;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a rear elevational view thereof;

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 2;

FIG. 9 is an enlarged view of the portion shown in BOX 9 in FIG. 2; and,

FIG. 10 is an enlarged view of the portion shown in BOX 10 in FIG. 8.

The broken lines show the boundary of enlarged portions and form no partof the claimed design.

CLAIM The ornamental design for a gas diffusion plate for a plasmaprocessing apparatus, as shown and described.